Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098282 | Film-forming composition, silicon-containing film, and resist pattern-forming method | Tomoya TAJI, Nozomi SATOU, Hiromitsu Tanaka, Tatsuya Sakai | 2024-09-24 |
| 10234762 | Pattern-forming method | Masayoshi Ishikawa, Hiromitsu Tanaka, Tomoharu Kawazu, Junya Suzuki, Yoshio Takimoto | 2019-03-19 |
| 9250526 | Composition for forming resist underlayer film, and pattern-forming method | Fumihiro Toyokawa, Yuushi MATSUMURA, Tooru Kimura | 2016-02-02 |
| 8956807 | Method for forming resist pattern, and composition for forming resist underlayer film | Hiromitsu Tanaka, Kazunori Takanashi, Shinya Minegishi, Takashi Mori, Jyunya Suzuki | 2015-02-17 |