Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506976 | Radiation-sensitive composition and resist pattern-forming method | Yusuke Asano, Shinya Minegishi | 2022-11-22 |
| 11204552 | Radiation-sensitive composition, pattern-forming method and radiation-sensitive acid generating agent | Tomoki Nagai, Takehiko Naruoka, Ken MARUYAMA, Motohiro SHIRATANI | 2021-12-21 |
| 11079676 | Radiation-sensitive composition, pattern-forming method, and metal-containing resin and production method thereof | Yusuke Asano, Shinya Minegishi | 2021-08-03 |
| 10725376 | Pattern-forming method | Takehiko Naruoka, Motohiro SHIRATANI | 2020-07-28 |
| 10520815 | Pattern-forming method | Takehiko Naruoka, Tomohisa Fujisawa, Motohiro SHIRATANI | 2019-12-31 |
| 10209619 | Composition and method of forming pattern using composition | Ryuichi Saitou, Shunsuke Kurita, Tatsuya Sakai | 2019-02-19 |
| 10120282 | Chemically amplified resist material and resist pattern-forming method | Takehiko Naruoka, Tomoki Nagai | 2018-11-06 |
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Tatsuya Sakai, Shunsuke Kurita, Satoshi Dei, Kazunori Takanashi, Yoshio Takimoto +1 more | 2018-10-02 |
| 10073348 | Resist-pattern-forming method and chemically amplified resist material | Takehiko Naruoka, Tomoki Nagai, Seiichi Tagawa, Akihiro Oshima, Seiji Nagahara | 2018-09-11 |
| 10073349 | Chemically amplified resist material, pattern-forming method, compound, and production method of compound | Takehiko Naruoka, Tomoki Nagai, Seiichi Tagawa, Akihiro Oshima, Seiji Nagahara | 2018-09-11 |
| 10018911 | Chemically amplified resist material and resist pattern-forming method | Takehiko Naruoka, Tomoki Nagai | 2018-07-10 |
| 9989849 | Chemically amplified resist material and resist pattern-forming method | Takehiko Naruoka, Tomoki Nagai | 2018-06-05 |
| 9971247 | Pattern-forming method | Takehiko Naruoka, Tomoki Nagai, Seiichi Tagawa, Akihiro Oshima, Seiji Nagahara | 2018-05-15 |
| 9939729 | Resist pattern-forming method | Takehiko Naruoka, Tomoki Nagai | 2018-04-10 |
| 9150962 | Method for producing substrate with metal body | Tatsuya Sakai, Hideki Nishimura, Masahiro Yamamoto, Ryuuichi Saitou, Hideyuki Aoki +1 more | 2015-10-06 |
| 9080065 | Composition for forming aluminum-containing film, and method for forming aluminum-containing film | Tatsuya Sakai | 2015-07-14 |
| 8404786 | Polymer and process for producing the same, composition for forming insulating film, and insulating film and method of forming the same | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2013-03-26 |
| 8268403 | Method for forming organic silica film, organic silica film, wiring structure, semiconductor device, and composition for film formation | Masahiro Akiyama, Tatsuya Yamanaka, Atsushi Shiota, Takahiko Kurosawa | 2012-09-18 |
| 8093419 | Method of producing organosilicon compound | Youhei Nobe, Kang-go Chung | 2012-01-10 |
| 8017700 | Polycarbosilane, method for producing same, silica composition for coating application, and silica film | Masahiro Akiyama, Tsuyoshi Furukawa, Naohisa Tokushige | 2011-09-13 |
| 7893538 | Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device | Tatsuya Yamanaka, Masahiro Akiyama, Terukazu Kokubo, Youhei Nobe | 2011-02-22 |
| 7875317 | Composition for forming insulating film, method for producing same, silica-based insulating film, and method for forming same | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2011-01-25 |
| 7736748 | Insulating-film-forming composition, method of producing the same, silica-based insulating film, and method of forming the same | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2010-06-15 |
| 7528207 | Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2009-05-05 |
| 7358317 | Polycarbosilane and method of producing the same | Masahiro Akiyama, Takahiko Kurosawa, Atsushi Shiota | 2008-04-15 |