Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520815 | Pattern-forming method | Takehiko Naruoka, Motohiro SHIRATANI, Hisashi Nakagawa | 2019-12-31 |
| 8815490 | Radiation-sensitive resin composition, polymer, and method for forming resist pattern | Yasuhiko Matsuda, Yukari Hama, Takanori Kawakami | 2014-08-26 |