Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9926462 | Composition for forming liquid immersion upper layer film, and polymer | Kiyoshi Tanaka, Takahiro Hayama, Motoyuki Shima | 2018-03-27 |
| 9540535 | Composition for forming liquid immersion upper layer film, and polymer | Kiyoshi Tanaka, Takahiro Hayama, Motoyuki Shima | 2017-01-10 |
| 9268225 | Composition, resist pattern-forming method, compound, method for production of compound, and polymer | Kiyoshi Tanaka, Shinya Minegishi, Takahiro Hayama | 2016-02-23 |
| 9261789 | Liquid immersion lithography upper-layer film-forming composition and photoresist pattern-forming method | Takahiro Hayama, Yukio Nishimura, Ken MARUYAMA, Kiyoshi Tanaka | 2016-02-16 |
| 9046775 | Composition for forming liquid immersion upper layer film, resist pattern-forming method, polymer, and compound | Shinya Minegishi, Kiyoshi Tanaka | 2015-06-02 |
| 8501389 | Upper layer-forming composition and resist patterning method | Takahiro Hayama, Norihiko Sugie, Motoyuki Shima, Kiyoshi Tanaka | 2013-08-06 |