Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319605 | Semiconductor treatment composition and treatment method | Yasutaka Kamei, Naoki Nishiguchi, Satoshi Kamo, Tomotaka Shinoda | 2019-06-11 |
| 10304694 | Semiconductor treatment composition and treatment method | Yasutaka Kamei, Naoki Nishiguchi, Satoshi Kamo, Tomotaka Shinoda | 2019-05-28 |
| 9926462 | Composition for forming liquid immersion upper layer film, and polymer | Kiyoshi Tanaka, Kazunori Kusabiraki, Motoyuki Shima | 2018-03-27 |
| 9920287 | Cleaning composition and cleaning method | Megumi Arakawa, Yuki Kushida, Kiyotaka MITSUMOTO, Yasutaka Kamei, Masahiro Noda +1 more | 2018-03-20 |
| 9540535 | Composition for forming liquid immersion upper layer film, and polymer | Kiyoshi Tanaka, Kazunori Kusabiraki, Motoyuki Shima | 2017-01-10 |
| 9268225 | Composition, resist pattern-forming method, compound, method for production of compound, and polymer | Kiyoshi Tanaka, Shinya Minegishi, Kazunori Kusabiraki | 2016-02-23 |
| 9261789 | Liquid immersion lithography upper-layer film-forming composition and photoresist pattern-forming method | Kazunori Kusabiraki, Yukio Nishimura, Ken MARUYAMA, Kiyoshi Tanaka | 2016-02-16 |
| 8501389 | Upper layer-forming composition and resist patterning method | Kazunori Kusabiraki, Norihiko Sugie, Motoyuki Shima, Kiyoshi Tanaka | 2013-08-06 |
| 8038127 | Method for manufacturing a hydrogen-added water and a device for the same | Daigo Matsuoka, Maiko Takebe, Toshinori Harada, Yuuichi Takagaki, Hisakazu Matsui | 2011-10-18 |