| 8012654 |
Photomask blank and photomask |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yosuke Kojima +2 more |
2011-09-06 |
| 8007964 |
Photomask blank and photomask |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata +2 more |
2011-08-30 |
| 8003284 |
Photomask blank and photomask |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yosuke Kojima +2 more |
2011-08-23 |
| 7989124 |
Photomask blank and photomask making method |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yosuke Kojima +2 more |
2011-08-02 |
| 7790339 |
Photomask blank |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yuichi Fukushima |
2010-09-07 |
| 7771893 |
Photomask blank, photomask and fabrication method thereof |
Hiroki Yoshikawa, Hiroshi Kubota, Yoshinori Kinase, Satoshi Okazaki, Tamotsu Maruyama +3 more |
2010-08-10 |
| 7767366 |
Photomask blank and photomask |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yosuke Kojima +2 more |
2010-08-03 |
| 7767367 |
Photomask blank and photomask making method |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yosuke Kojima +2 more |
2010-08-03 |
| 7691546 |
Photomask blank and photomask |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata +2 more |
2010-04-06 |
| 7625677 |
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof |
Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Satoshi Okazaki, Motohiko Morita |
2009-12-01 |
| 7618753 |
Photomask blank, photomask and method for producing those |
Hiroki Yoshikawa, Yukio Inazuki, Yoshinori Kinase, Satoshi Okazaki, Takashi Haraguchi +3 more |
2009-11-17 |
| 7598004 |
Film-depositing target and preparation of phase shift mask blank |
Hiroki Yoshikawa, Toshinobu Ishihara, Satoshi Okazaki, Yukio Inazuki, Kimihiro Okada +3 more |
2009-10-06 |
| 7556892 |
Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method |
Kimihiro Okada, Masahide Iwakata, Takashi Haraguchi, Mikio Takagi, Yuichi Fukushima +4 more |
2009-07-07 |
| 7351505 |
Phase shift mask blank, phase shift mask, and pattern transfer method |
Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yuichi Fukushima +1 more |
2008-04-01 |