Issued Patents All Time
Showing 1–25 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265321 | Reflective mask blank, and method for manufacturing reflective mask | Takuro Kosaka, Taiga OGOSE, Hideo Kaneko | 2025-04-01 |
| 12050396 | Reflective mask blank, method of manufacturing thereof, and reflective mask | Takuro Kosaka, Shohei Mimura, Takuro Yamamoto | 2024-07-30 |
| 11860529 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko, Kazuhiro Nishikawa | 2024-01-02 |
| 11835851 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko, Kazuhiro Nishikawa | 2023-12-05 |
| 11789357 | Method of manufacturing reflective mask blank, and reflective mask blank | Takuro Kosaka, Tsuneo Terasawa | 2023-10-17 |
| 11624712 | Substrate defect inspection method and substrate defect inspection apparatus | Tsuneo Terasawa, Hideo Kaneko | 2023-04-11 |
| 11415874 | Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask | Tsuneo Terasawa, Hideo Kaneko, Takuro Kosaka | 2022-08-16 |
| 11327393 | Photomask blank and method for preparing photomask | Takuro Kosaka, Hideo Kaneko | 2022-05-10 |
| 11143949 | Photomask blank, method of manufacturing photomask, and photomask | Kouhei Sasamoto | 2021-10-12 |
| 11131920 | Photomask blank, and method of manufacturing photomask | Kouhei Sasamoto, Naoki Matsuhashi | 2021-09-28 |
| 10989999 | Halftone phase shift mask blank and halftone phase shift mask | Takuro Kosaka, Kouhei Sasamoto, Hideo Kaneko | 2021-04-27 |
| 10859904 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Hideo Kaneko | 2020-12-08 |
| 10809611 | Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus | — | 2020-10-20 |
| 10788747 | Photomask blank and method for producing photomask | Kouhei Sasamoto, Naoki Matsuhashi | 2020-09-29 |
| 10782609 | Photomask blank and photomask | Ryoken OZAWA, Takuro Kosaka | 2020-09-22 |
| 10782608 | Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target | Kouhei Sasamoto, Tsutomu Yuri | 2020-09-22 |
| 10747098 | Halftone phase shift photomask blank | Souichi Fukaya | 2020-08-18 |
| 10712654 | Photomask blank | Souichi Fukaya | 2020-07-14 |
| 10678125 | Photomask blank and method for preparing photomask | Takuro Kosaka, Hideo Kaneko | 2020-06-09 |
| 10670957 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | Takuro Kosaka, Hideo Kaneko | 2020-06-02 |
| 10656516 | Photomask blank, and preparation method thereof | Takuro Kosaka | 2020-05-19 |
| 10585345 | Photomask blank, method for manufacturing photomask, and mask pattern formation method | Shigeo Irie, Takashi Yoshii, Keiichi Masunaga, Hideo Kaneko, Toyohisa Sakurada | 2020-03-10 |
| 10564537 | Photomask blank, and preparation method thereof | Takuro Kosaka | 2020-02-18 |
| 10545401 | Phase shift mask blank, phase shift mask, and blank preparing method | Takuro Kosaka | 2020-01-28 |
| 10488750 | Mask blank and making method | Hideo Kaneko | 2019-11-26 |