Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747098 | Halftone phase shift photomask blank | Yukio Inazuki | 2020-08-18 |
| 10712654 | Photomask blank | Yukio Inazuki | 2020-07-14 |
| 10120274 | Method of manufacturing photomask blank and photomask blank | Yukio Inazuki | 2018-11-06 |
| 10040220 | Blank for mold production and method for manufacturing mold | Hideo Nakagawa, Kouhei Sasamoto | 2018-08-07 |
| 9952501 | Photomask blank, making method, and photomask | Shinichi Igarashi, Takashi Yoshii | 2018-04-24 |
| 9880459 | Photomask blank and method for preparing photomask | Kouhei Sasamoto, Yukio Inazuki | 2018-01-30 |
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Kouhei Sasamoto, Hideo Nakagawa | 2017-12-26 |
| 9798229 | Designing of photomask blank and photomask blank | Kouhei Sasamoto, Hideo Kaneko, Yukio Inazuki | 2017-10-24 |
| 9798230 | Photomask blank | Kouhei Sasamoto | 2017-10-24 |
| 9689066 | Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method | Hiroki Yoshikawa, Yukio Inazuki, Hideo Nakagawa | 2017-06-27 |
| 9618838 | Photomask blank | Yukio Inazuki | 2017-04-11 |
| 9581892 | Method of manufacturing photomask blank and photomask blank | Yukio Inazuki | 2017-02-28 |
| 9541823 | Photomask blank | Kouhei Sasamoto, Yukio Inazuki, Hideo Nakagawa, Hideo Kaneko | 2017-01-10 |
| 9488907 | Photomask blank, process for production of photomask, and chromium-containing material film | Hiroki Yoshikawa, Yukio Inazuki, Tsuneo Yamamoto, Hideo Nakagawa | 2016-11-08 |
| 9440375 | Blank for mold production and method for manufacturing mold | Hideo Nakagawa, Kouhei Sasamoto | 2016-09-13 |
| 9268212 | Photomask blank and method for manufacturing photomask | Hideo Nakagawa, Kouhei Sasamoto | 2016-02-23 |
| 9188852 | Photomask blank, method for manufacturing photomask, and method for manufacturing phase shift mask | Hideo Nakagawa, Kouhei Sasamoto | 2015-11-17 |
| 9158192 | Half-tone phase shift mask blank and method for manufacturing half-tone phase shift mask | Hideo Nakagawa, Kouhei Sasamoto | 2015-10-13 |
| 9063427 | Photomask blank and manufacturing method thereof | — | 2015-06-23 |
| 8968972 | Photomask blank, process for production of photomask, and chromium-containing material film | Hiroki Yoshikawa, Yukio Inazuki, Tsuneo Yamamoto, Hideo Nakagawa | 2015-03-03 |