Issued Patents All Time
Showing 1–25 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12342467 | Microstructure-transfer apparatus, stamp head unit, stamp component for transferring microstructure, and method for transferring microstructure-integrated component | Yoshinori Ogawa, Nobuaki Matsumoto, Shuhei Ueda, Keiji Ohori, Kohei Otake | 2025-06-24 |
| 10040220 | Blank for mold production and method for manufacturing mold | Souichi Fukaya, Kouhei Sasamoto | 2018-08-07 |
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Souichi Fukaya, Kouhei Sasamoto | 2017-12-26 |
| 9689066 | Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method | Hiroki Yoshikawa, Souichi Fukaya, Yukio Inazuki | 2017-06-27 |
| 9541823 | Photomask blank | Kouhei Sasamoto, Yukio Inazuki, Souichi Fukaya, Hideo Kaneko | 2017-01-10 |
| 9488907 | Photomask blank, process for production of photomask, and chromium-containing material film | Hiroki Yoshikawa, Souichi Fukaya, Yukio Inazuki, Tsuneo Yamamoto | 2016-11-08 |
| 9440375 | Blank for mold production and method for manufacturing mold | Souichi Fukaya, Kouhei Sasamoto | 2016-09-13 |
| 9268212 | Photomask blank and method for manufacturing photomask | Souichi Fukaya, Kouhei Sasamoto | 2016-02-23 |
| 9188852 | Photomask blank, method for manufacturing photomask, and method for manufacturing phase shift mask | Souichi Fukaya, Kouhei Sasamoto | 2015-11-17 |
| 9158192 | Half-tone phase shift mask blank and method for manufacturing half-tone phase shift mask | Souichi Fukaya, Kouhei Sasamoto | 2015-10-13 |
| 9048687 | Power supply device and control method for power supply | Mikio Nakajima, Tetsuya Yano, Yu Yoshioka | 2015-06-02 |
| 8968972 | Photomask blank, process for production of photomask, and chromium-containing material film | Hiroki Yoshikawa, Souichi Fukaya, Yukio Inazuki, Tsuneo Yamamoto | 2015-03-03 |
| 8486832 | Method for fabricating semiconductor device | Yasunori Morinaga | 2013-07-16 |
| 8017518 | Method for manufacturing a semiconductor device | Yasunori Morinaga | 2011-09-13 |
| 7997900 | Partial denture | — | 2011-08-16 |
| 7985691 | Etching method, semiconductor and fabricating method for the same | Kenshi Kanegae, Shinichi Imai | 2011-07-26 |
| 7923522 | Process for preparing a dispersion liquid of zeolite fine particles | Yoshitaka Hamada, Masaru Sasago, Yasunori Morinaga | 2011-04-12 |
| 7919005 | Dry etching method, fine structure formation method, mold and mold fabrication method | Masaru Sasago, Tomoyasu Murakami | 2011-04-05 |
| 7906030 | Dry etching method, fine structure formation method, mold and mold fabrication method | Masaru Sasago, Tomoyasu Murakami | 2011-03-15 |
| 7893535 | Semiconductor device and method for fabricating the same | Atsushi Ikeda, Nobuo Aoi | 2011-02-22 |
| 7786022 | Method for forming insulating film with low dielectric constant | Yoshitaka Hamada, Fujio Yagihashi, Takeshi Asano, Masaru Sasago | 2010-08-31 |
| 7758761 | Dry etching method, fine structure formation method, mold and mold fabrication method | Masaru Sasago, Tomoyasu Murakami | 2010-07-20 |
| 7754330 | Organic silicon oxide core-shell particles and preparation method thereof, porous film-forming composition, porous film and formation method thereof, and semiconductor device | Yoshitaka Hamada, Fujio Yagihashi, Takeshi Asano, Masaru Sasago | 2010-07-13 |
| 7732339 | Etching method, semiconductor and fabricating method for the same | Kenshi Kanegae, Shinichi Imai | 2010-06-08 |
| 7731862 | Dry etching method, fine structure formation method, mold and mold fabrication method | Masaru Sasago, Tomoyasu Murakami | 2010-06-08 |