Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12024532 | Silanol compound and method for producing silanol compound | Masayasu IGARASHI, Kazuhiko Sato, Tomohiro Matsumoto, Takeshi Nozawa, Shigeru Shimada | 2024-07-02 |
| 8951917 | Composition for forming resist underlayer film and patterning process using the same | Tsutomu Ogihara, Takafumi Ueda, Toshiharu Yano | 2015-02-10 |
| 8715913 | Silicon-containing resist underlayer film-forming composition and patterning process | Tsutomu Ogihara, Takafumi Ueda | 2014-05-06 |
| 8277600 | High-temperature bonding composition, substrate bonding method, and 3-D semiconductor device | Yoshitaka Hamada, Takeshi Asano | 2012-10-02 |
| 8257528 | Substrate joining method and 3-D semiconductor device | Yoshitaka Hamada, Takeshi Asano | 2012-09-04 |
| 7786022 | Method for forming insulating film with low dielectric constant | Yoshitaka Hamada, Takeshi Asano, Hideo Nakagawa, Masaru Sasago | 2010-08-31 |
| 7754330 | Organic silicon oxide core-shell particles and preparation method thereof, porous film-forming composition, porous film and formation method thereof, and semiconductor device | Yoshitaka Hamada, Takeshi Asano, Hideo Nakagawa, Masaru Sasago | 2010-07-13 |
| 7651829 | Positive resist material and pattern formation method using the same | Yoshitaka Hamada, Mutsuo Nakashima, Kazumi Noda, Katsuya Takemura | 2010-01-26 |
| 7405459 | Semiconductor device comprising porous film | Tsutomu Ogihara, Hideo Nakagawa, Masaru Sasago | 2008-07-29 |
| 7402621 | Porous-film-forming composition, preparation method of the composition, porous film and semiconductor device | Tsutomu Ogihara, Yoshitaka Hamada, Takeshi Anaso, Motoaki Iwabuchi, Masaru Sasago +1 more | 2008-07-22 |
| 7357961 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Motoaki Iwabuchi, Yoshitaka Hamada, Takeshi Asano, Hideo Nakagawa, Masaru Sasago | 2008-04-15 |
| 7341775 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Yoshitaka Hamada, Hideo Nakagawa, Masaru Sasago | 2008-03-11 |
| 7332446 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film and semiconductor device | Tsutomu Ogihara, Yoshitaka Hamada, Takeshi Asano, Motoaki Iwabuchi, Hideo Nakagawa +1 more | 2008-02-19 |
| 7309722 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Hideo Nakagawa, Masaru Sasago | 2007-12-18 |
| 7303785 | Antireflective film material, and antireflective film and pattern formation method using the same | Tsutomu Ogihara, Takeshi Asano, Motoaki Iwabuchi | 2007-12-04 |
| 7244657 | Zeolite sol and method for preparing the same, composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Hideo Nakagawa, Masaru Sasago | 2007-07-17 |
| 7239018 | Composition for forming a porous film prepared by hydrolysis and condensation of an alkoxysilane using a trialkylmethylammonium hydroxide catalyst | Yoshitaka Hamada, Hideo Nakagawa, Masaru Sasago | 2007-07-03 |
| 7205338 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Hideo Nakagawa, Masaru Sasago | 2007-04-17 |
| 7202013 | Antireflective film material, and antireflective film and pattern formation method using the same | Tsutomu Ogihara, Takeshi Asano, Motoaki Iwabuchi | 2007-04-10 |
| 7132473 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Yoshitaka Hamada, Takeshi Asano, Motoaki Iwabuchi, Hideo Nakagawa +1 more | 2006-11-07 |
| 7126208 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Motoaki Iwabuchi, Yoshitaka Hamada, Hideo Nakagawa, Masaru Sasago | 2006-10-24 |
| 7119354 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film | Yoshitaka Hamada, Hideo Nakagawa, Masaru Sasago | 2006-10-10 |
| 7084505 | Porous film, composition and manufacturing method, interlayer dielectric film, and semiconductor device | Yoshitaka Hamada, Hideo Nakagawa, Masaru Sasago | 2006-08-01 |
| 6841334 | Onium salts and positive resist materials using the same | Tomoyoshi Furihata, Jun Watanabe, Akinobu Tanaka, Yoshio Kawai, Tadahito Matsuda | 2005-01-11 |
| 6680107 | Film forming composition, porous film and their preparation | Motoaki Iwabuchi, Akira Yamamoto | 2004-01-20 |