Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782347 | Composition for forming organic film, patterning process, and polymer | Daisuke KORI, Kenta ISHIWATA, Yasuyuki Yamamoto | 2023-10-10 |
| 11485824 | Thermosetting silicon-containing compound, composition for forming a silicon-containing film, and patterning process | Ryo MITSUI, Kazunori Maeda, Tsutomu Ogihara, Seiichiro Tachibana | 2022-11-01 |
| 10007183 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara, Takeru Watanabe, Kazumi Noda | 2018-06-26 |
| 9977330 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara, Takeru Watanabe, Kazumi Noda | 2018-05-22 |
| 9372404 | Organic film composition, method for forming organic film and patterning process using this, and heat-decomposable polymer | Takeru Watanabe, Seiichiro Tachibana, Toshihiko Fujii, Kazumi Noda, Takeshi Kinsho | 2016-06-21 |
| 9261788 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Tsutomu Ogihara, Takeru Watanabe, Kazumi Noda | 2016-02-16 |
| 8951917 | Composition for forming resist underlayer film and patterning process using the same | Tsutomu Ogihara, Takafumi Ueda, Fujio Yagihashi | 2015-02-10 |
| 8951711 | Patterning process and composition for forming silicon-containing film usable therefor | Tsutomu Ogihara, Takafumi Ueda | 2015-02-10 |
| 8932953 | Composition for forming a silicon-containing resist underlayer film and patterning process using the same | Tsutomu Ogihara, Takafumi Ueda, Yoshinori Taneda | 2015-01-13 |
| 8859189 | Patterning process | Tsutomu Ogihara, Takafumi Ueda | 2014-10-14 |
| 8852844 | Composition for forming silicon-containing film, silicon-containing film-formed substrate and patterning process | Tsutomu Ogihara, Takafumi Ueda | 2014-10-07 |
| 8835102 | Patterning process and composition for forming silicon-containing film usable therefor | Tsutomu Ogihara, Takafumi Ueda | 2014-09-16 |
| 8697330 | Composition for forming a silicon-containing antireflection film, substrate having the silicon-containing antireflection film from the composition and patterning process using the same | Tsutomu Ogihara, Takafumi Ueda | 2014-04-15 |
| 8652750 | Silicon-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method | Tsutomu Ogihara, Koji Hasegawa | 2014-02-18 |
| 8652267 | Coated-type silicon-containing film stripping process | Tsutomu Ogihara, Takafumi Ueda, Shozo Shirai | 2014-02-18 |
| 8501386 | Silicon-containing film-forming composition, silicon-containing film-formed substrate, and patterning process | Tsutomu Ogihara, Takafumi Ueda, Koji Hasegawa | 2013-08-06 |
| 8343711 | Patterning process | Tsutomu Ogihara, Takafumi Ueda | 2013-01-01 |
| 8029974 | Metal oxide-containing film-forming composition, metal oxide-containing film-formed substrate, and patterning process | Tsutomu Ogihara, Takafumi Ueda | 2011-10-04 |
| 8026038 | Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method | Tsutomu Ogihara, Takafumi Ueda, Mutsuo Nakashima | 2011-09-27 |
| 7875417 | Silicone-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method | Tsutomu Ogihara, Koji Hasegawa | 2011-01-25 |