Issued Patents All Time
Showing 1–25 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8198016 | Patterning process | Jun Hatakeyama, Tsutomu Ogihara, Kazuhiro Katayama | 2012-06-12 |
| 8153836 | Silsesquioxane compound mixture, hydrolyzable silane compound, making methods, resist composition, patterning process, and substrate processing | Yoshitaka Hamada, Katsuya Takemura, Kazumi Noda | 2012-04-10 |
| 8129100 | Double patterning process | Katsuya Takemura, Jun Hatakeyama, Kazumi Noda, Masaki Ohashi, Toshinobu Ishihara | 2012-03-06 |
| 8026038 | Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method | Tsutomu Ogihara, Takafumi Ueda, Toshiharu Yano | 2011-09-27 |
| 7745094 | Resist composition and patterning process using the same | Yoshitaka Hamada, Katsuya Takemura, Kazumi Noda | 2010-06-29 |
| 7651829 | Positive resist material and pattern formation method using the same | Yoshitaka Hamada, Fujio Yagihashi, Kazumi Noda, Katsuya Takemura | 2010-01-26 |
| 7638256 | Fluorinated cyclic structure-bearing silicon compounds and silicone resins, resist compositions using the same, and patterning process | Takeshi Kinsho, Takeru Watanabe, Yoshitaka Hamada | 2009-12-29 |
| 7550247 | Resist composition and patterning process | Yoshitaka Hamada, Katsuya Takemura, Kazumi Noda, Toshihiko Fujii | 2009-06-23 |
| 7485408 | Fluorine-containing silicon compounds, silicone resins, resist compositions, and patterning process | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe | 2009-02-03 |
| 7265234 | Silsesquioxane compound mixture, method of making, resist composition, and patterning process | Yoshitaka Hamada | 2007-09-04 |
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Seiichiro Tachibana +1 more | 2005-11-08 |
| 6835525 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Kenji Funatsu | 2004-12-28 |
| 6784268 | Ether, polymer, resist composition and patterning process | Seiichiro Tachibana, Tsunehiro Nishi | 2004-08-31 |
| 6780563 | Polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Takeru Watanabe, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2004-08-24 |
| 6743566 | Cyclic acetal compound, polymer, resist composition and patterning process | Seiichiro Tachibana, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi +1 more | 2004-06-01 |
| 6730453 | High molecular weight silicone compounds, resist compositions, and patterning method | Ichiro Kaneko, Toshinobu Ishihara, Junji Tsuchiya, Jun Hatakeyama, Shigehiro Nagura | 2004-05-04 |
| 6677101 | Polymers, resist materials, and pattern formation method | Tsunehiro Nishi, Koji Hasegawa | 2004-01-13 |
| 6673515 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2004-01-06 |
| 6670498 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Seiichiro Tachibana +1 more | 2003-12-30 |
| 6670094 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Tomohiro Kobayashi | 2003-12-30 |
| 6660448 | Polymer, resist composition and patterning process | Seiichiro Tachibana, Tsunehiro Nishi, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe +1 more | 2003-12-09 |
| 6624335 | Ether, polymer, resist composition and patterning process | Seiichiro Tachibana, Tsunehiro Nishi | 2003-09-23 |
| 6605678 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Tomohiro Kobayashi | 2003-08-12 |
| 6596463 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Seiichiro Tachibana +1 more | 2003-07-22 |
| 6586157 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Seiichiro Tachibana +1 more | 2003-07-01 |