Issued Patents All Time
Showing 26–50 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7663239 | Semiconductor device and method for fabricating the same | Atsushi Ikeda, Nobuo Aoi | 2010-02-16 |
| 7659626 | Semiconductor device including a barrier metal film | Atsushi Ikeda, Nobuo Aoi | 2010-02-09 |
| 7563706 | Material for forming insulating film with low dielectric constant, low dielectric insulating film, method for forming low dielectric insulating film and semiconductor device | Masaru Sasago | 2009-07-21 |
| 7563709 | Pattern formation method and method for forming semiconductor device | Masaru Sasago, Yoshihiko Hirai | 2009-07-21 |
| 7405459 | Semiconductor device comprising porous film | Tsutomu Ogihara, Fujio Yagihashi, Masaru Sasago | 2008-07-29 |
| 7402621 | Porous-film-forming composition, preparation method of the composition, porous film and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Yoshitaka Hamada, Takeshi Anaso, Motoaki Iwabuchi +1 more | 2008-07-22 |
| 7357961 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Motoaki Iwabuchi, Fujio Yagihashi, Yoshitaka Hamada, Takeshi Asano, Masaru Sasago | 2008-04-15 |
| 7341775 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Yoshitaka Hamada, Fujio Yagihashi, Masaru Sasago | 2008-03-11 |
| 7332446 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Yoshitaka Hamada, Takeshi Asano, Motoaki Iwabuchi +1 more | 2008-02-19 |
| 7309722 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Masaru Sasago | 2007-12-18 |
| 7294571 | Concave pattern formation method and method for forming semiconductor device | Masaru Sasago, Yoshihiko Hirai | 2007-11-13 |
| 7291554 | Method for forming semiconductor device | Masaru Sasago, Yoshihiko Hirai | 2007-11-06 |
| 7282452 | Etching method, semiconductor and fabricating method for the same | Kenshi Kanegae, Shinichi Imai | 2007-10-16 |
| 7273820 | Method for fabricating semiconductor device | Masaru Sasago, Masayuki Endo, Yoshihiko Hirai | 2007-09-25 |
| 7244657 | Zeolite sol and method for preparing the same, composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Masaru Sasago | 2007-07-17 |
| 7239018 | Composition for forming a porous film prepared by hydrolysis and condensation of an alkoxysilane using a trialkylmethylammonium hydroxide catalyst | Yoshitaka Hamada, Fujio Yagihashi, Masaru Sasago | 2007-07-03 |
| 7233052 | Semiconductor device including fine dummy patterns | Eiji Tamaoka | 2007-06-19 |
| 7205338 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Masaru Sasago | 2007-04-17 |
| 7132473 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Tsutomu Ogihara, Fujio Yagihashi, Yoshitaka Hamada, Takeshi Asano, Motoaki Iwabuchi +1 more | 2006-11-07 |
| 7126208 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device | Motoaki Iwabuchi, Fujio Yagihashi, Yoshitaka Hamada, Masaru Sasago | 2006-10-24 |
| 7119354 | Composition for forming porous film, porous film and method for forming the same, interlevel insulator film | Fujio Yagihashi, Yoshitaka Hamada, Masaru Sasago | 2006-10-10 |
| 7084505 | Porous film, composition and manufacturing method, interlayer dielectric film, and semiconductor device | Yoshitaka Hamada, Fujio Yagihashi, Masaru Sasago | 2006-08-01 |
| 6930393 | Composition for forming porous film, porous film and method for forming the same, interlayer insulator film, and semiconductor device | Yoshitaka Hamada, Takeshi Asano, Masaru Sasago | 2005-08-16 |
| 6890830 | Semiconductor device and method for fabricating the same | Eiji Tamaoka | 2005-05-10 |
| 6828247 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | Toshio Hayashi, Yasuhiro Morikawa | 2004-12-07 |