Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288688 | Manufacturing method of photomask, and photomask blank | — | 2025-04-29 |
| 11971653 | Photomask blank, method for producing photomask, and photomask | Naoki Matsuhashi | 2024-04-30 |
| 11774845 | Photomask blank, and manufacturing method thereof | Hideo Kaneko | 2023-10-03 |
| 11143949 | Photomask blank, method of manufacturing photomask, and photomask | Yukio Inazuki | 2021-10-12 |
| 11131920 | Photomask blank, and method of manufacturing photomask | Yukio Inazuki, Naoki Matsuhashi | 2021-09-28 |
| 10989999 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Takuro Kosaka, Hideo Kaneko | 2021-04-27 |
| 10788747 | Photomask blank and method for producing photomask | Yukio Inazuki, Naoki Matsuhashi | 2020-09-29 |
| 10782608 | Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target | Yukio Inazuki, Tsutomu Yuri | 2020-09-22 |
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Takuro Kosaka, Hideo Kaneko | 2019-11-05 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Takuro Kosaka, Yukio Inazuki, Hideo Kaneko | 2019-08-06 |
| 10040220 | Blank for mold production and method for manufacturing mold | Souichi Fukaya, Hideo Nakagawa | 2018-08-07 |
| 9880459 | Photomask blank and method for preparing photomask | Souichi Fukaya, Yukio Inazuki | 2018-01-30 |
| 9864269 | Photomask blank | — | 2018-01-09 |
| 9864266 | Photomask blank | Yukio Inazuki | 2018-01-09 |
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Souichi Fukaya, Hideo Nakagawa | 2017-12-26 |
| 9798230 | Photomask blank | Souichi Fukaya | 2017-10-24 |
| 9798229 | Designing of photomask blank and photomask blank | Hideo Kaneko, Yukio Inazuki, Souichi Fukaya | 2017-10-24 |
| 9541823 | Photomask blank | Yukio Inazuki, Souichi Fukaya, Hideo Nakagawa, Hideo Kaneko | 2017-01-10 |
| 9440375 | Blank for mold production and method for manufacturing mold | Souichi Fukaya, Hideo Nakagawa | 2016-09-13 |
| 9366951 | Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method | Yukio Inazuki, Toyohisa Sakurada, Hideo Kaneko, Takuro Kosaka | 2016-06-14 |
| 9268212 | Photomask blank and method for manufacturing photomask | Souichi Fukaya, Hideo Nakagawa | 2016-02-23 |
| 9188852 | Photomask blank, method for manufacturing photomask, and method for manufacturing phase shift mask | Souichi Fukaya, Hideo Nakagawa | 2015-11-17 |
| 9158192 | Half-tone phase shift mask blank and method for manufacturing half-tone phase shift mask | Souichi Fukaya, Hideo Nakagawa | 2015-10-13 |