Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073756 | Photomask blank, photomask blank making method, and photomask making method | Takuro Kosaka, Hideo Kaneko, Naoki Kawaura | 2021-07-27 |
| 11061319 | Photomask blank and making method | Takuro Kosaka, Tsuneo Terasawa, Takahiro KISHITA | 2021-07-13 |
| 10585345 | Photomask blank, method for manufacturing photomask, and mask pattern formation method | Takashi Yoshii, Keiichi Masunaga, Yukio Inazuki, Hideo Kaneko, Toyohisa Sakurada | 2020-03-10 |
| 9291889 | Photo mask and method for forming pattern using the same | Yoshimasa YOSHIOKA, Akio Misaka, Hiroshi Sakaue, Masaru Sasago | 2016-03-22 |
| 8278014 | Photomask and pattern formation method using the same | Akio Misaka, Yuji Nonami, Tetsuya Nakamura, Chika Harada | 2012-10-02 |
| 8007959 | Photomask and pattern formation method using the same | Yuji Nonami, Akio Misaka | 2011-08-30 |
| 7998641 | Photomask and pattern formation method using the same | Akio Misaka, Yuji Nonami, Tetsuya Nakamura, Chika Harada | 2011-08-16 |
| 6984472 | Exposure method and apparatus | — | 2006-01-10 |
| 6966710 | Pattern forming method and apparatus for fabricating semiconductor device | — | 2005-11-22 |
| 6855485 | Pattern forming method and apparatus for fabricating semiconductor device | — | 2005-02-15 |
| 6677108 | Method for light exposure | Nobuyuki Matsuzawa | 2004-01-13 |
| 6500550 | Resin-composite aluminum profiles, heat insulating aluminum profiles, and method and apparatus for production thereof | Masatake Tsuboi, Masaki Wakabayashi, Norio Shioda, Masaaki Iwakura, Toshiyuki Shoji | 2002-12-31 |
| 6143372 | Resin-composite aluminum profiles and apparatus for production thereof | Masatake Tsuboi, Masaki Wakabayashi, Norio Shioda, Masaaki Iwakura, Toshiyuki Shoji | 2000-11-07 |