Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137678 | Method of evaluating photomask blank-associated substrate | — | 2021-10-05 |
| 11061319 | Photomask blank and making method | Takuro Kosaka, Tsuneo Terasawa, Shigeo Irie | 2021-07-13 |
| 10295477 | Methods for defect inspection, sorting, and manufacturing photomask blank | Tsuneo Terasawa, Hiroshi Fukuda, Atsushi YOKOHATA, Daisuke Iwai | 2019-05-21 |
| 9829442 | Defect inspecting method, sorting method and producing method for photomask blank | Tsuneo Terasawa, Atsushi YOKOHATA, Daisuke Iwai, Hiroshi Fukuda | 2017-11-28 |
| 9829787 | Defect inspecting method, sorting method, and producing method for photomask blank | Tsuneo Terasawa, Hiroshi Fukuda, Daisuke Iwai, Atsushi YOKOHATA | 2017-11-28 |
| 9772551 | Evaluation method of defect size of photomask blank, selection method, and manufacturing method | Tsuneo Terasawa, Daisuke Iwai, Hiroshi Fukuda, Atsushi YOKOHATA | 2017-09-26 |