Issued Patents All Time
Showing 51–75 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9091931 | Photomask blank and method for manufacturing photomask | Yosuke Kojima, Hiroki Yoshikawa, Ryuji Koitabashi | 2015-07-28 |
| 8992788 | Evaluation of etching conditions for pattern-forming film | Shinichi Igarashi, Hiroki Yoshikawa, Hideo Kaneko | 2015-03-31 |
| 8980503 | Binary photomask blank and binary photomask making method | Hiroki Yoshikawa, Kazuhiro Nishikawa, Hideo Kaneko | 2015-03-17 |
| 8968972 | Photomask blank, process for production of photomask, and chromium-containing material film | Hiroki Yoshikawa, Souichi Fukaya, Tsuneo Yamamoto, Hideo Nakagawa | 2015-03-03 |
| 8920666 | Etching method and photomask blank processing method | Shinichi Igarashi, Hideo Kaneko, Hiroki Yoshikawa, Yoshinori Kinase | 2014-12-30 |
| 8841048 | Photomask blank, photomask, and making method | Shinichi Igarashi, Kazuhiro Nishikawa, Hiroki Yoshikawa | 2014-09-23 |
| 8753786 | Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank | Hiroki Yoshikawa, Ryuji Koitabashi, Hideo Kaneko, Yosuke Kojima, Takashi Haraguchi +1 more | 2014-06-17 |
| 8753787 | Light pattern exposure method, photomask, and photomask blank | Hiroki Yoshikawa, Ryuji Koitabashi, Hideo Kaneko, Yosuke Kojima, Takashi Haraguchi +1 more | 2014-06-17 |
| 8475978 | Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film | Hiroki Yoshikawa, Ryuji Koitabashi, Hideo Kaneko, Takashi Haraguchi, Yosuke Kojima +1 more | 2013-07-02 |
| 8417018 | Method for inspecting and judging photomask blank or intermediate thereof | Hideo Kaneko, Hiroki Yoshikawa | 2013-04-09 |
| 8309277 | Photomask making method | Shinichi Igarashi, Hideo Kaneko, Hiroki Yoshikawa, Yoshinori Kinase | 2012-11-13 |
| 8304146 | Photomask making method, photomask blank and dry etching method | Shinichi Igarashi, Hideo Kaneko, Kazuhiro Nishikawa | 2012-11-06 |
| 8168351 | Method for inspecting photomask blank or intermediate thereof, method for determining dosage of high-energy radiation, and method for manufacturing photomask blank | Hideo Kaneko, Hiroki Yoshikawa | 2012-05-01 |
| 8148036 | Photomask blank and photomask | Hideo Kaneko, Hiroki Yoshikawa | 2012-04-03 |
| 8012654 | Photomask blank and photomask | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-09-06 |
| 8007964 | Photomask blank and photomask | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata, Mikio Takagi +2 more | 2011-08-30 |
| 8003284 | Photomask blank and photomask | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-08-23 |
| 7989124 | Photomask blank and photomask making method | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2011-08-02 |
| 7790339 | Photomask blank | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yuichi Fukushima | 2010-09-07 |
| 7767367 | Photomask blank and photomask making method | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2010-08-03 |
| 7767366 | Photomask blank and photomask | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga, Yosuke Kojima +2 more | 2010-08-03 |
| 7736824 | Photomask blank, photomask, and method of manufacture | Hiroki Yoshikawa, Noriyasu Fukushima, Hideo Kaneko, Satoshi Okazaki | 2010-06-15 |
| 7691546 | Photomask blank and photomask | Hiroki Yoshikawa, Satoshi Okazaki, Takashi Haraguchi, Masahide Iwakata, Mikio Takagi +2 more | 2010-04-06 |
| 7632609 | Fabrication method of photomask-blank | Noriyasu Fukushima, Hiroki Yoshikawa, Hideo Kaneko | 2009-12-15 |
| 7625677 | Half-tone stacked film, photomask-blank, photomask and fabrication method thereof | Hiroki Yoshikawa, Yoshinori Kinase, Satoshi Okazaki, Motohiko Morita, Tadashi Saga | 2009-12-01 |