Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361274 | Etching apparatus and etching method | Ki-Young Yun, Il-Kyoung Kim, Sung-wook Park, Seung-Ki Chae, No-Hyun Huh +8 more | 2013-01-29 |
| 8083507 | Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft | Tea-Jin Park, Seung-Ki Chae, Sang-Gon Lee | 2011-12-27 |
| 7497963 | Etching method | Ki-Young Yun, Seung-Ki Chae, No-Hyun Huh, Wan-Goo Hwang, Jung-Hyun Hwang +3 more | 2009-03-03 |
| 6869500 | Method for processing a wafer and apparatus for performing the same | Mikio Takagi, Jae-Hyuk An, Seung-Ki Chae, Jea-Wook Kim | 2005-03-22 |