Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083892 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Jin-Man Kim | 2011-12-27 |
| 7786010 | Method for forming a thin layer on semiconductor substrates | Hyun Wook LEE, Bu-Cheul Lee, Jeong-Soo Suh, Sung Il Han, Seong-Ju Choi | 2010-08-31 |
| 7578944 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Jin-Man Kim | 2009-08-25 |
| 7497963 | Etching method | Kwang-Myung Lee, Ki-Young Yun, Seung-Ki Chae, No-Hyun Huh, Jung-Hyun Hwang +3 more | 2009-03-03 |
| 7193369 | Method for generating gas plasma | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Jin-Man Kim | 2007-03-20 |
| 6858854 | Method and apparatus for measuring inclination angle of ion beam | Gyeong-Su Keum, Jae-Im Yun, Hyung-Sik Hong, Chung-Hun Park | 2005-02-22 |
| 6833621 | Metal gasket for a semiconductor fabrication chamber | Tae Won Lee, Do-In Bae, Guk-Kwang Kim, Jaung-Joo Kim | 2004-12-21 |