Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7652264 | Filament member, ion source, and ion implantation apparatus | Ui Hui Kwon, Tai-Kyung Kim, Won-Young Chung, Kwang-Ho Cha | 2010-01-26 |
| 7170070 | Ion implanters having an arc chamber that affects ion current density | Ui Hui Kwon, Won-Young Chung, Kwang-Ho Cha, Young Tae Kim, Seung-Ki Chae +3 more | 2007-01-30 |
| 7112810 | Ion implanting apparatus and ion implanting method using the same | Seung-Ki Chae, Hyung-Sik Hong, Sang Yeob Cha, Jae Hyun Han, Tae-Sub Im +3 more | 2006-09-26 |
| 6903336 | Polarity exchanger and ion implanter having the same | Gum-Hyun Shin, Hyung-Sik Hong, Kyue-sang Choi, Chung-Hun Park | 2005-06-07 |
| 6858854 | Method and apparatus for measuring inclination angle of ion beam | Jae-Im Yun, Hyung-Sik Hong, Chung-Hun Park, Wan-Goo Hwang | 2005-02-22 |
| 6720533 | Heater assembly for heating a wafer | Hyung-Sik Hong, Chung-Hun Park, Eun-Seok Song, Jae Han Park | 2004-04-13 |
| 6705020 | Method of and apparatus for use in orienting an object at a reference angle | Hyung-Sik Hong, Yun-Sik Yang, Gum-Chan An, Hae-Keun Youn, Byoung-Sik Jung +1 more | 2004-03-16 |
| 6590378 | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system | Sang-Mun Chon, Hyung-Sik Hong | 2003-07-08 |
| 6449585 | Wafer sidewall inspection system and method | Ki Chul Hyun | 2002-09-10 |