Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830165 | Method and apparatus for simultaneously acquiring super-resolution image and high-speed widefield image | Tae Seong Woo | 2023-11-28 |
| 7194325 | System to and method of monitoring condition of process tool | Seung-Jun Lee, Seung-Yong Doh, Yoo Seok Jang | 2007-03-20 |
| 6903336 | Polarity exchanger and ion implanter having the same | Gyeong-Su Keum, Gum-Hyun Shin, Hyung-Sik Hong, Kyue-sang Choi | 2005-06-07 |
| 6858854 | Method and apparatus for measuring inclination angle of ion beam | Gyeong-Su Keum, Jae-Im Yun, Hyung-Sik Hong, Wan-Goo Hwang | 2005-02-22 |
| 6720533 | Heater assembly for heating a wafer | Gyeong-Su Keum, Hyung-Sik Hong, Eun-Seok Song, Jae Han Park | 2004-04-13 |