Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7194325 | System to and method of monitoring condition of process tool | Seung-Jun Lee, Chung-Hun Park, Yoo Seok Jang | 2007-03-20 |
| 7184910 | Method of compensating sensor data and evaluating an interlock of an interlock system | Seung-Jun Lee, Hak-Yong Kim, Yoo Seok Jang, Chang Hun Park | 2007-02-27 |