Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988812 | Substrate treatment apparatus | Ki Sang Kim, Byong-Kyu Seo, Soon-Chon Park | 2011-08-02 |
| 6903336 | Polarity exchanger and ion implanter having the same | Gyeong-Su Keum, Gum-Hyun Shin, Hyung-Sik Hong, Chung-Hun Park | 2005-06-07 |
| 6740169 | Method of reworking a conditioning disk | Sung-bum Cho, Baik-Soon Choi, Jin-Sung Kim | 2004-05-25 |
| 6596087 | Method of cleaning conditioning disk | Sung-bum Cho, Baik-Soon Choi, Jin-Sung Kim | 2003-07-22 |
| 6494927 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Baik-Soon Choi, Jin-Sung Kim | 2002-12-17 |
| 6213856 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Baik-Soon Choi, Jin-Sung Kim | 2001-04-10 |
| 6150762 | Method of manufacturing cathode for plasma etching apparatus using chemical surface treatment with potassium hydroxide (KOH), and cathode manufactured thereby | Jin-Sung Kim, Young-gu Lee, Kyoung-man Shim | 2000-11-21 |
| 6023368 | Illumination system for use with an optical instrument having an auxiliary magnifying lens | Chang-Woo Woo, Hee-duk Kim | 2000-02-08 |
| 6018415 | X-Y table having belt drives for moving a stage of the table in fine increments and microscope comprising the same | Chang-Woo Woo, Yeun-kyoung Shin, Jae-Young WOO | 2000-01-25 |
| 5785929 | Waste gas disposal apparatus | Hee-duck Kim, Jin-Man Kim | 1998-07-28 |