Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10894935 | Composition for removing silicone resins and method of thinning substrate by using the same | In-goo Kang, Sung-Bae Kim, Sue KIM, Young-Taek Hong, Sang Tae Kim +3 more | 2021-01-19 |
| 9840785 | Tin plating solution, tin plating equipment, and method for fabricating semiconductor device using the tin plating solution | Myung-Beom Park, Jin Hee Lee, Jung-Sik Choi | 2017-12-12 |
| 8227182 | Methods of forming a photosensitive film | Ahn-Ho Lee, Seung-Hyun Ahn, Sang Tae Kim, Yong-Il Kim, Shi-Jin Sung +1 more | 2012-07-24 |
| 7863231 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Sang-Mun Chon, Dae-Joung Kim, Kwang-Sub Yoon +5 more | 2011-01-04 |
| 7387988 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Sang-Mun Chon, Dae-Joung Kim, Kwang-Sub Yoon +5 more | 2008-06-17 |
| 6740169 | Method of reworking a conditioning disk | Sung-bum Cho, Jin-Sung Kim, Kyue-sang Choi | 2004-05-25 |
| 6682876 | Thinner composition and method of stripping a photoresist using the same | Seung-Hyun Ahn, Sang-Mun Chon, Hoe-Sik Chung, Mi-sook Jeon, Eun-Mi Bae +2 more | 2004-01-27 |
| 6664119 | Chemical vapor deposition method for manufacturing semiconductor devices | Jung-il An, Jin-Sung Kim, Jung Ki Kim | 2003-12-16 |
| 6596087 | Method of cleaning conditioning disk | Sung-bum Cho, Jin-Sung Kim, Kyue-sang Choi | 2003-07-22 |
| 6589719 | Photoresist stripper compositions | Seung-Hyun Ahn, Sang-Mun Chon, Hoe-Sik Chung, Mi-sook Jeon, Eun-Mi Bae +1 more | 2003-07-08 |
| 6585907 | Method for manufacturing a shield for an inductively-couple plasma apparatus | Eun-Hee Shin, Jin-Man Kim, Hun Cha | 2003-07-01 |
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Hak-pil Kim, Eun-Hee Shin | 2002-12-31 |
| 6494927 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Jin-Sung Kim, Kyue-sang Choi | 2002-12-17 |
| 6432838 | Chemical vapor deposition apparatus for manufacturing semiconductor devices, its driving method, and method of optimizing recipe of cleaning process for process chamber | Jung-il An, Jin-Sung Kim, Jung Ki Kim | 2002-08-13 |
| 6335284 | Metallization process for manufacturing semiconductor devices | Jae-saeng Lee, Eun-Hee Shin, Sung-bum Cho | 2002-01-01 |
| 6279503 | Chemical vapor deposition apparatus for manufacturing semiconductor devices | Jung-il An, Jin-Sung Kim, Jung Ki Kim | 2001-08-28 |
| 6251241 | Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield | Eun-Hee Shin, Jin-Man Kim, Hun Cha | 2001-06-26 |
| 6216548 | Method for sampling particles present in a processing chamber | Hee-jung PARK, Jin-Sung Kim, Sung-Chul Kang | 2001-04-17 |
| 6213856 | Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk | Sung-bum Cho, Jin-Sung Kim, Kyue-sang Choi | 2001-04-10 |
| 6179955 | Dry etching apparatus for manufacturing semiconductor devices | Eun-Hee Shin, Sung-bum Cho, Young-Koo Lee | 2001-01-30 |
| 6146492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method | Sung-bum Cho, Hak-pil Kim, Eun-Hee Shin | 2000-11-14 |
| 6119532 | Apparatus and method for particle sampling during semiconductor device manufacturing | Hee-jung PARK, Jin-Sung Kim, Sung-Chul Kang | 2000-09-19 |