Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning | Sung-bum Cho, Eun-Hee Shin, Baik-Soon Choi | 2002-12-31 |
| 6146492 | Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method | Sung-bum Cho, Eun-Hee Shin, Baik-Soon Choi | 2000-11-14 |