| 6585907 |
Method for manufacturing a shield for an inductively-couple plasma apparatus |
Jin-Man Kim, Baik-Soon Choi, Hun Cha |
2003-07-01 |
| 6499492 |
Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning |
Sung-bum Cho, Hak-pil Kim, Baik-Soon Choi |
2002-12-31 |
| 6335284 |
Metallization process for manufacturing semiconductor devices |
Baik-Soon Choi, Jae-saeng Lee, Sung-bum Cho |
2002-01-01 |
| 6251241 |
Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield |
Jin-Man Kim, Baik-Soon Choi, Hun Cha |
2001-06-26 |
| 6179955 |
Dry etching apparatus for manufacturing semiconductor devices |
Sung-bum Cho, Baik-Soon Choi, Young-Koo Lee |
2001-01-30 |
| 6146492 |
Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method |
Sung-bum Cho, Hak-pil Kim, Baik-Soon Choi |
2000-11-14 |
