Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7112810 | Ion implanting apparatus and ion implanting method using the same | Gyeong-Su Keum, Seung-Ki Chae, Sang Yeob Cha, Jae Hyun Han, Tae-Sub Im +3 more | 2006-09-26 |
| 6924072 | Method for exposing a peripheral area of a wafer and apparatus for performing the same | Dong-Wha Shin, Byung Ho Min, Jae Hong Choi | 2005-08-02 |
| 6903336 | Polarity exchanger and ion implanter having the same | Gyeong-Su Keum, Gum-Hyun Shin, Kyue-sang Choi, Chung-Hun Park | 2005-06-07 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Kyung-Dae Kim, Min Gyu Kim | 2005-03-01 |
| 6858854 | Method and apparatus for measuring inclination angle of ion beam | Gyeong-Su Keum, Jae-Im Yun, Chung-Hun Park, Wan-Goo Hwang | 2005-02-22 |
| 6795162 | Method for exposing a peripheral area of a wafer and apparatus for performing the same | Dong-Wha Shin, Byung Ho Min, Jae Hong Choi | 2004-09-21 |
| 6720533 | Heater assembly for heating a wafer | Gyeong-Su Keum, Chung-Hun Park, Eun-Seok Song, Jae Han Park | 2004-04-13 |
| 6705020 | Method of and apparatus for use in orienting an object at a reference angle | Gyeong-Su Keum, Yun-Sik Yang, Gum-Chan An, Hae-Keun Youn, Byoung-Sik Jung +1 more | 2004-03-16 |
| 6590378 | Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system | Sang-Mun Chon, Gyeong-Su Keum | 2003-07-08 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Kyung-Dae Kim, Min Gyu Kim | 2003-03-25 |
| 6099242 | Wafer aligning apparatus for semiconductor device fabrication | Sung-soo An | 2000-08-08 |