Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7223721 | Resist and etching by-product removing composition and resist removing method using the same | Dong-Jin Park, Sang-Mun Chon, Jin Ho Hwang, Il-hyun Sohn, Sang-Oh Park +1 more | 2007-05-29 |
| 7208454 | Cleaning solution for removing anti-reflective coating composition | Dong-Jin Park, Hoi-Sik Chung, Pil-Kwon Jun, Young-Ho Kim | 2007-04-24 |
| 7081182 | Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process | Jae-Jun Ryu, June-Ing Gill, Yong-Woo Heo | 2006-07-25 |
| 6898007 | Microscope for inspecting semiconductor wafer | Jai-Young Woo, Jin-Sung Kim, Young Goo Lee | 2005-05-24 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Hyung-Sik Hong, Min Gyu Kim | 2005-03-01 |
| 6777379 | Cleaning solution and method of cleaning anti-reflective coating composition using the same | Dong-Jin Park, Hoi-Sik Chung, Pil-Kwon Jun, Young-Ho Kim | 2004-08-17 |
| 6713440 | Resist and etching by-product removing composition and resist removing method using the same | Dong-Jin Park, Sang-Mun Chon, Jin Ho Hwang, Il-hyun Sohn, Sang-Oh Park +1 more | 2004-03-30 |
| 6655042 | System and method for drying semiconductor substrate | Hun-Jung Yi, Ki Seok Lee, Bo-yong Lee, Sang-Oh Park, Pil-Kwon Jun +1 more | 2003-12-02 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Yun-Sik Yang, Hyung-Sik Hong, Min Gyu Kim | 2003-03-25 |
| 6443826 | Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same | Yun-Sik Yang, Hun Cha, Min Gyu Kim | 2002-09-03 |