Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9267882 | Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same | Eun-Ju Song | 2016-02-23 |
| 8767203 | Plasma monitoring device using a cylindrical hollow electrode | Se-Yeon Kim, Sangpyoung Jeon, Hyojin Yun | 2014-07-01 |
| 8043974 | Semiconductor wet etchant and method of forming interconnection structure using the same | Jung-Dae Park, Young-Sub You, Tae-Hyo Choi, Kun-Hyung Lee | 2011-10-25 |
| 7959884 | Apparatus for purifying air and purifying method thereof | Seung-Ki Cha, Chang-Su Lim | 2011-06-14 |
| 7943562 | Semiconductor substrate cleaning methods, and methods of manufacture using same | Da-Hee Lee, Jung-Dae Park, Tae-Hyo Choi | 2011-05-17 |
| 7880138 | Apparatus and method for analyzing contaminants on wafer | Jae Seok Lee, Heung Bin Lim, Won Ryu, Seung-Ki Chae, Yang-Koo Lee | 2011-02-01 |
| 7556712 | Laser cleaning of backside of wafer for photolithographic processing | Seung-Ki Chae | 2009-07-07 |
| 7520068 | Apparatus and method for drying semiconductor substrates | Sang-Oh Park | 2009-04-21 |
| 7386944 | Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer | Won-Young Chung, Sang-Oh Park, Ye-Ro Lee | 2008-06-17 |
| 7351667 | Etching solution for silicon oxide method of manufacturing a semiconductor device using the same | Dong Won Hwang, Kwang-Shin Lim, Jung-Dae Park | 2008-04-01 |
| 7191545 | Apparatus to dry substrates | — | 2007-03-20 |
| 7100306 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Yong-Kyun Ko | 2006-09-05 |
| 6959823 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Yong-Kyun Ko | 2005-11-01 |
| 6905570 | Apparatus for manufacturing integrated circuit device | Kwang-Shin Lim, Pil-Kwon Jun, Sang-Oh Park, Yong-Kyun Ko | 2005-06-14 |
| 6883248 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Yong-Kyun Ko, Jae-Jun Ryu, Pil-Kwon Jun | 2005-04-26 |
| 6655042 | System and method for drying semiconductor substrate | Ki Seok Lee, Bo-yong Lee, Sang-Oh Park, Pil-Kwon Jun, Sang-Mun Chon +1 more | 2003-12-02 |
| 6395144 | Method for treating toxic compounds-containing gas by non-thermal plasma | Yeon-Seok Choi, Young Hoon Song, Seock Joon Kim | 2002-05-28 |