Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7311857 | Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device | Sang-Mun Chon, In-Hoi Doh, Pil-Kwon Jun, Sang Mi Lee, Kwang-Shin Lim +1 more | 2007-12-25 |
| 7100306 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Hun-Jung Yi | 2006-09-05 |
| 6959823 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Hun-Jung Yi | 2005-11-01 |
| 6939410 | Apparatus and method for collecting impurities on a semiconductor wafer | Byung-Woo Son, Jong Cheol JEONG | 2005-09-06 |
| 6905570 | Apparatus for manufacturing integrated circuit device | Kwang-Shin Lim, Pil-Kwon Jun, Hun-Jung Yi, Sang-Oh Park | 2005-06-14 |
| 6883248 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Jae-Jun Ryu, Hun-Jung Yi, Pil-Kwon Jun | 2005-04-26 |
| 6149731 | Valve cleaning method | — | 2000-11-21 |
| 6137018 | Chemical refining method and reuse system for semiconductor device manufacturing | June-ing Gil, Sang-Mun Chon | 2000-10-24 |
| 5948690 | Pretreatment system for analyzing impurities contained in flat sample | Jin-Ho Ju, Sung-Chul Kang | 1999-09-07 |