Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7081182 | Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process | Kyung-Dae Kim, June-Ing Gill, Yong-Woo Heo | 2006-07-25 |
| 6883248 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Yong-Kyun Ko, Hun-Jung Yi, Pil-Kwon Jun | 2005-04-26 |
| 5856623 | Particle counter with sampling probe having adjustable intake area | Yo-Han Ahn, Tac-ho Kim, Joung-Sun Lee | 1999-01-05 |