Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7081182 | Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process | Jae-Jun Ryu, Kyung-Dae Kim, Yong-Woo Heo | 2006-07-25 |
| 6960265 | Apparatus and method for collecting metallic impurity on a semiconductor wafer | Yong-Woo Heo, Mi Kyoung Lee, Hyun-Gi Cho | 2005-11-01 |