| 8585391 |
Photomask cleaning apparatus and methods of cleaning a photomask using the same |
Jin Ho Kim, Jeong-In Yoon, Ji-Young Kim |
2013-11-19 |
| 8146447 |
Contamination analysis unit and method thereof, and reticle cleaning system |
Ok-Sun Lee, Hyung Choi, Ji-Young Kim |
2012-04-03 |
| 8027017 |
Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath |
Ju-A Ryu, Jeong-Heung Kong, Yang-Koo Lee, Hun-Hwan Ha, Hweon Jin +1 more |
2011-09-27 |
| 7914594 |
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same |
Chang Min Cho, Joo Young Kim, Ji-Young Kim, Ju-A Ryu, Hyung Choi +1 more |
2011-03-29 |
| 7850449 |
Heat treatment equipment |
Jae-Hyun Yang, Kun-Hyung Lee, Gui-Young Cho, Hong Hee Jeong, Mi-Ae Kim |
2010-12-14 |
| 7326284 |
Contamination control system and air-conditioning system of a substrate processing apparatus using the same |
Tae Jin Hwang, Jae-Hyun Yang, Jung-Sung Hwang, Hyun Joon Kim |
2008-02-05 |
| 7258728 |
Apparatus and method for cleaning air |
Chang-Su Lim, Suk-Hee Im, Sun-Wook Park |
2007-08-21 |
| 7161660 |
Photolithography system and method of monitoring the same |
Seok-Ryeul Lee, Jung-Sung Hwang, Tae Jin Hwang, Byung-Moo Lee |
2007-01-09 |
| 7065898 |
Module for transferring a substrate |
Hyun Joon Kim, Dong-Seok Ham, Jae Bong KIM |
2006-06-27 |
| 6996453 |
Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module |
Ki-Doo Kim, Soo Woong LEE, Jung-Sung Hwang, Hyeog-Ki Kim |
2006-02-07 |
| 6737206 |
Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same |
Sang-Kap Kim |
2004-05-18 |
| 6613487 |
Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same |
Sang-Kap Kim |
2003-09-02 |
| 6522385 |
Air shower head of photolithography equipment for directing air towards a wafer stage |
Byung-Moo Lee, Hyun Joon Kim, Jai-Heung Choi |
2003-02-18 |
| 6402598 |
Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof |
Byung-Moo Lee, Jae Won Choi, Tae Ho Kim |
2002-06-11 |
| 6370793 |
Apparatus for controlling the temperature of a wafer located at a pre-alignment stage |
Hee-Sun Chae, Jae Il Kim |
2002-04-16 |
| 6098023 |
Driving control system and monitoring device for fan filter unit in semiconductor clean room |
Jung-Sung Hwang, Jae-heung Choi, Dong Joo Lee |
2000-08-01 |
| 6093229 |
Drive checking system for fan filter units in clean room |
Kun-Hyung Lee, Jung-Sung Hwang, Jae-heung Choi |
2000-07-25 |
| 6036781 |
Apparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipment |
Jin-chul Yoon, Chang-jip Yang, Ho-Wang Kim |
2000-03-14 |
| 5856623 |
Particle counter with sampling probe having adjustable intake area |
Tac-ho Kim, Jae-Jun Ryu, Joung-Sun Lee |
1999-01-05 |
