Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9250544 | Particle counter and immersion exposure system including the same | Jinho Kim, Jiyoung Kim, Kwangshin Lim | 2016-02-02 |
| 8585391 | Photomask cleaning apparatus and methods of cleaning a photomask using the same | Jin Ho Kim, Yo-Han Ahn, Ji-Young Kim | 2013-11-19 |