Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8469650 | Method of controlling pressure in a wafer transfer system | Soo Woong LEE, Hyung Choi, Sung Hwan Choi | 2013-06-25 |
| 7988122 | Vibration control pedestal and installation method thereof | Seok-Youn Kim, Ho Young Lee, Do-Hyun Kwun, Jung Shik Heo | 2011-08-02 |
| 7438514 | Wafer transfer system | Soo Woong LEE, Hyung Choi, Sung Hwan Choi | 2008-10-21 |
| 7326284 | Contamination control system and air-conditioning system of a substrate processing apparatus using the same | Tae Jin Hwang, Jae-Hyun Yang, Hyun Joon Kim, Yo-Han Ahn | 2008-02-05 |
| 7161660 | Photolithography system and method of monitoring the same | Yo-Han Ahn, Seok-Ryeul Lee, Tae Jin Hwang, Byung-Moo Lee | 2007-01-09 |
| 7156892 | Filter protection device for preventing damage to an air filter | Dae Won Kim, Tae-Hyup Kim | 2007-01-02 |
| 7047793 | Sensitive substance and surface acoustic wave gas sensor using the same | Kun-Hyung Lee, Seung-Yeon Cho | 2006-05-23 |
| 6996453 | Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module | Yo-Han Ahn, Ki-Doo Kim, Soo Woong LEE, Hyeog-Ki Kim | 2006-02-07 |
| 6849100 | Fresh air ducts including downstream filters for clean rooms | Chang-Su Lim, Suk-Hee Im | 2005-02-01 |
| 6387333 | Gas purifying system | Tae Ho Kim, Soon Young LEE, Jae-heung Choi | 2002-05-14 |
| 6295864 | Analysis system and method for water-soluble contaminants in a cleanroom environment | Nam-hee You, Soon Young LEE, Kwang Young Kim | 2001-10-02 |
| 6176120 | Methods of analyzing water soluble contaminants generated during microelectronic device manufacturing processes | Nam-hee You, Dong Soo Lee, Sun-Young Lee | 2001-01-23 |
| 6098023 | Driving control system and monitoring device for fan filter unit in semiconductor clean room | Jae-heung Choi, Yo-Han Ahn, Dong Joo Lee | 2000-08-01 |
| 6093229 | Drive checking system for fan filter units in clean room | Kun-Hyung Lee, Yo-Han Ahn, Jae-heung Choi | 2000-07-25 |
| 5972293 | Aqueous compositions for making ultrapure water used in microelectronic device fabrication processes and methods of sterilizing ultrapure water delivery systems using the same | Seung-uhn Kim, Yun-chul Oh, Sue KIM | 1999-10-26 |
| 5890367 | Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier | Nam-hee You, Gee-do Kim, Young-Jin Han | 1999-04-06 |
| 5871812 | Apparatus and method for depositing molecular impurities on a semiconductor wafer | Dong Joo Lee, Nam-hee You, Sang-young Moon | 1999-02-16 |