Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953739 | Method for manufacturing a semiconductor device having hemispherical grains at very low atmospheric pressure using first, second, and third vacuum pumps | Chan Hee HAN, Young-kyou Park, Jae Wook Kim | 2005-10-11 |
| 6683010 | Method for forming silicon-oxynitride layer on semiconductor device | Baek-gyun Lim, Eu-seok Kim, Young-kyou Park | 2004-01-27 |
| 6673673 | Method for manufacturing a semiconductor device having hemispherical grains | Chan Hee HAN, Young-kyou Park, Jae Wook Kim | 2004-01-06 |
| 6423998 | Semiconductor device capacitor and method of manufacturing the same | Kyung-ho Hyun, Byung-soo Koo, Wook-Sung Son | 2002-07-23 |
| 6323084 | Semiconductor device capacitor and method of manufacturing the same | Kyung-ho Hyun, Byung-soo Koo, Wook-Sung Son | 2001-11-27 |
| 6312987 | Method for manufacturing semiconductor device having hemispherical grain polysilicon film | Chan Hee HAN, Young Ho Kang, Young-kyou Park | 2001-11-06 |
| 6090188 | Air intake apparatus of chemical vapor deposition equipment and method for removing ozone using the same | Geun-mok Youk, Chong-hyeong Cho, Young-kyou Park | 2000-07-18 |
| 6074486 | Apparatus and method for manufacturing a semiconductor device having hemispherical grains | Chan Hee HAN, Young-kyou Park, Jae Wook Kim | 2000-06-13 |
| 6036781 | Apparatus for guiding air current in a wafer loading chamber for chemical vapor deposition equipment | Yo-Han Ahn, Jin-chul Yoon, Ho-Wang Kim | 2000-03-14 |
| 5821152 | Methods of forming hemispherical grained silicon electrodes including multiple temperature steps | Chan Hee HAN, Young-kyou Park, Jae Wook Kim | 1998-10-13 |
| 5470611 | Method for forming an oxide film of a semiconductor | Jun Gyo Jung | 1995-11-28 |
| 5352293 | Tube apparatus for manufacturing semiconductor device | Kyu-Bok Ryu, Jung-Soo An, Jun-geen An | 1994-10-04 |