Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423998 | Semiconductor device capacitor and method of manufacturing the same | Byung-soo Koo, Wook-Sung Son, Chang-jip Yang | 2002-07-23 |
| 6326322 | Method for depositing a silicon nitride layer | Ki Young Kim, Joong-Il An | 2001-12-04 |
| 6323084 | Semiconductor device capacitor and method of manufacturing the same | Byung-soo Koo, Wook-Sung Son, Chang-jip Yang | 2001-11-27 |
| 6265264 | Method of doping and HSG surface of a capacitor electrode with PH3 under a low temperature/high pressure processing condition | Joong-Il An, Byung-Su Koo, Sun-Woo Kwak | 2001-07-24 |