Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472269 | Method for forming capacitor | Jung-Hun Yun, Byung-Su Koo, Su-Young Kwon | 2002-10-29 |
| 6391715 | Method for forming a capacitor | Jung-Hun Yun, Byung-Su Koo, Su-Young Kwon | 2002-05-21 |
| 6265264 | Method of doping and HSG surface of a capacitor electrode with PH3 under a low temperature/high pressure processing condition | Joong-Il An, Kyung-ho Hyun, Byung-Su Koo | 2001-07-24 |
| 6133148 | Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method | Seok-Jun Won, Kyoung-Hoon Kim, Young-Wook Park, Kab-jin Nam, Duk-soo Yoon | 2000-10-17 |