Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6326322 | Method for depositing a silicon nitride layer | Ki Young Kim, Kyung-ho Hyun | 2001-12-04 |
| 6265261 | Semiconductor device and fabricating method therefor in which a netride layer in a capacitor is formed in a shortened time period | Ki Young Kim, Kyoung-Ho Hyon, Byung-Su Koo | 2001-07-24 |
| 6265264 | Method of doping and HSG surface of a capacitor electrode with PH3 under a low temperature/high pressure processing condition | Kyung-ho Hyun, Byung-Su Koo, Sun-Woo Kwak | 2001-07-24 |
| 6015758 | Method of stripping a wafer of its film with gas injected into a CVD apparatus in which the wafer is disposed | Kyung Su Kim, Jung-Su Lim, Jung Ki Kim | 2000-01-18 |