Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268853 | Exposing systems providing post exposure baking and related methods | Sung-Jae Ryu, Young-kyou Park, Yoon-Ho Eo | 2007-09-11 |
| 6992270 | Wafer bake system and method for operating the same | Dong Woo Lee, Jin-Sung Lee, Dong-Hwa Shin, Tae Gyu Kim | 2006-01-31 |
| 6737206 | Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same | Yo-Han Ahn | 2004-05-18 |
| 6613487 | Pre-alignment system of exposure apparatus having wafer cooling means and exposure method using the same | Yo-Han Ahn | 2003-09-02 |