Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027017 | Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath | Ju-A Ryu, Jeong-Heung Kong, Yang-Koo Lee, Yo-Han Ahn, Hweon Jin +1 more | 2011-09-27 |
| 6398430 | Semiconductor device fabrication system | Gyu-chan Jeoung, Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hong-Ji Lee +2 more | 2002-06-04 |
| 6358672 | Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist | Gyu-chan Jeoung, Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hong-Ji Lee +2 more | 2002-03-19 |