Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189467 | Apparatus and method of attaching pad on edge ring | Jin-Uk Park, Sun Ho Kim, Sung Jin Kim, Jong-Geug Kim, Kyu-Chul Shim +4 more | 2021-11-30 |
| 7776226 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-hwan Kwag | 2010-08-17 |
| 6930050 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-hwan Kwag | 2005-08-16 |
| 6503365 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-hwan Kwag | 2003-01-07 |
| 6398430 | Semiconductor device fabrication system | Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hong-Ji Lee, Hoe-Sik Chung +2 more | 2002-06-04 |
| 6358672 | Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist | Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hong-Ji Lee, Hoe-Sik Chung +2 more | 2002-03-19 |