Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7776226 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-chan Jeoung | 2010-08-17 |
| 6930050 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-chan Jeoung | 2005-08-16 |
| 6732750 | Semiconductor wafer cleaning apparatus and method of using the same | Yong Joon Cho, Seung-Kun Lee, Young-hwan Yun | 2004-05-11 |
| 6503365 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing | Ki Sang Kim, Gyu-chan Jeoung | 2003-01-07 |
| 6460269 | Wafer dryer comprising revolving spray nozzle and method for drying wafers using the same | Yong Joon Cho | 2002-10-08 |
| 6436809 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method | Se-Jong Ko, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2002-08-20 |
| 6402849 | Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device | Hyun Han, Ki-Heum Nam | 2002-06-11 |
| 6235147 | Wet-etching facility for manufacturing semiconductor devices | Seung-Kun Lee, Jae-Hyung Jung, Young-hwan Yun | 2001-05-22 |
| 6232228 | Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method | Se-Jong Ko, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2001-05-15 |
| 6200414 | Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof | Kyung-Seuk Hwang, Young-hwan Yun | 2001-03-13 |
| 6197150 | Apparatus for wafer treatment for the manufacture of semiconductor devices | Kyung-Seuk Hwang | 2001-03-06 |
| 6140233 | Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices thereby | Se-Jong Ko, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more | 2000-10-31 |
| 6113754 | Sputtering apparatus having a target backing plate equipped with a cooling line and sputtering method using the same | Jung Suk Oh, Yoon-Sei Park | 2000-09-05 |
| 5900163 | Methods for performing plasma etching operations on microelectronic structures | Whi-kun Yi, Dai-sik Moon, Sung-kyeong Kim, Kyung-Hoon Kim | 1999-05-04 |