Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11411391 | Energy storage system protection system | Suk-Ki Kim, Dong-ki Hong | 2022-08-09 |
| 7793671 | Apparatus for and method of cleaning substrates | — | 2010-09-14 |
| 7398801 | Apparatus and method for processing wafers | Kun-Hyung Lee, Soo Woong LEE, Hyun Ho Cho, Hee-Sun Chae, Sun-Yong Lee | 2008-07-15 |
| 7343922 | Wafer drying apparatus | Young Min Kwon, Jong Jae Lee, Dong-Hoon Jung | 2008-03-18 |
| 6896743 | Wafer drying methods of Marangoni type and apparatus suitable therefor | Young Min Kwon, Jong Jae Lee, Dong-Hoon Jung | 2005-05-24 |
| 6430840 | Method of and apparatus for drying a wafer using isopropyl alcohol | — | 2002-08-13 |
| 6235147 | Wet-etching facility for manufacturing semiconductor devices | Seung-Kun Lee, Young-hwan Yun, Gyu-hwan Kwag | 2001-05-22 |
| 6059986 | Wet station apparatus having quartz heater monitoring system and method of monitoring thereof | Young-hwan Yun, Se-Jong Ko, Min-sang Yun | 2000-05-09 |
| 5944939 | Wet station apparatus having quartz heater monitoring system and method of monitoring thereof | Young-hwan Yun, Se-Jong Ko, Min-sang Yun | 1999-08-31 |
| 5715851 | Wafer cassette and cleaning system adopting the same | Young-hwan Yun, Ho Chang | 1998-02-10 |