Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7842606 | Method of depositing thin film and method of manufacturing semiconductor using the same | Ki Hoon Lee, Young-Hoon Park, Sahng Kyoo Lee, Tae-Wook Seo | 2010-11-30 |
| 6884297 | Thin film deposition reactor | Young-Hoon Park, Choon Kum BAIK, Hong Lim | 2005-04-26 |
| 5715851 | Wafer cassette and cleaning system adopting the same | Jae-Hyung Jung, Young-hwan Yun | 1998-02-10 |