Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312060 | Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same | Jeong-hee Cho, Jong Sik LEE, Han Saem Rhee, Hyun Jun Kim | 2019-06-04 |
| 9536708 | Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device | Jeong-hee Cho, Jong Sik LEE, Han Saem Rhee, Hyun Jun Kim | 2017-01-03 |
| 7598180 | Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby | Jeong-hun Park, Kyoung-Shin Park | 2009-10-06 |
| 7398801 | Apparatus and method for processing wafers | Kun-Hyung Lee, Soo Woong LEE, Hyun Ho Cho, Jae-Hyung Jung, Sun-Yong Lee | 2008-07-15 |
| 7101752 | Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby | Jeong-hun Park, Kyoung-Shin Park | 2006-09-05 |
| 6766210 | Process error prevention method in semiconductor fabricating equipment | Tae Ha Jun, Kyung-Bo Sim, Jong-Hwan Weon | 2004-07-20 |
| 6604012 | Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same | Dae Cho, Seok-Hyun Kim, Seung-hoon Tong, Tae-Yang Yoon, Doh-Soon Kwak +3 more | 2003-08-05 |
| 6445443 | Lithography system including mechanism for setting optimal process parameters and method of operating the same | Chan Hoon Park | 2002-09-03 |
| 6370793 | Apparatus for controlling the temperature of a wafer located at a pre-alignment stage | Jae Il Kim, Yo-Han Ahn | 2002-04-16 |
| 6027604 | Dry etching apparatus having upper and lower electrodes with grooved insulating rings or grooved chamber sidewalls | Joung-hyun Lim | 2000-02-22 |
| 5828039 | Method and apparatus for heating chemical used in microelectronic device fabrication | — | 1998-10-27 |
| 5816970 | Semiconductor fabricating apparatus with remote belt tension sensor | — | 1998-10-06 |
| 5760693 | Vacuum apparatus for semiconductor device | — | 1998-06-02 |
| 5672230 | Central management system of wet chemical stations | Heung-Soo Park | 1997-09-30 |