Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312060 | Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same | Hee-Sun Chae, Jeong-hee Cho, Jong Sik LEE, Hyun Jun Kim | 2019-06-04 |
| 10109459 | Substrate treating apparatus, substrate treating method, and plasma generating unit | Sung-Jin Yoon, Dong Hoon Kim | 2018-10-23 |
| 9536708 | Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device | Hee-Sun Chae, Jeong-hee Cho, Jong Sik LEE, Hyun Jun Kim | 2017-01-03 |