Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027604 | Dry etching apparatus having upper and lower electrodes with grooved insulating rings or grooved chamber sidewalls | Hee-Sun Chae | 2000-02-22 |
JL
Joung-hyun Lim
Overall (All Time): #3,607,332 of 4,157,543Top 90%
1
Patents All Time