Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6037267 | Method of etching metallic film for semiconductor devices | Hun Cha | 2000-03-14 |
| 5900163 | Methods for performing plasma etching operations on microelectronic structures | Whi-kun Yi, Dai-sik Moon, Kyung-Hoon Kim, Gyu-hwan Kwag | 1999-05-04 |