Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819969 | Chemical vapor deposition process and apparatus for performing the same | Hee Tae Lee, Kwang-Sig Kim, Jong Woo Kim | 2004-11-16 |
| 6113754 | Sputtering apparatus having a target backing plate equipped with a cooling line and sputtering method using the same | Jung Suk Oh, Gyu-hwan Kwag | 2000-09-05 |